Partial spatial coherence in an excimer-laser lithographic imaging system

We have recently explored the Elementary Function method, previously presented by Wald et al (Proc. SPIE 59621G, 2005), and we have demonstrated under what circumstances this method can be used to reduce the propagation calculations of partially coherent light to two dimensions. In this paper, we examine the methods used to measure the spatial coherence of a light source in the literature. We present a method based on work previously shown by Mej́ıa et al (Opt Comm 273 (428-434), 2007) which uses an array of pinholes with one degree of redundancy. We discuss the design of the pinhole array and present the results of some simulations.